Seeded recrystallization of thick polysilicon films on oxidized 3‐in. wafers
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93741
Reference9 articles.
1. Laser‐induced crystallization of silicon islands on amorphous substrates: Multilayer structures
2. Annular grain structures in pulsed laser recrystallized Si on amorphous insulators
3. Single Crystal Silicon‐on‐Oxide by a Scanning CW Laser Induced Lateral Seeding Process
4. Seeded oscillatory growth of Si over SiO2by cw laser irradiation
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2. Large area recrystallization of thick polysilicon films for low cost partial SOI power devices;Microelectronics Journal;2006-03
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