Annular grain structures in pulsed laser recrystallized Si on amorphous insulators
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.92760
Reference2 articles.
1. A melting model for pulsing‐laser annealing of implanted semiconductors
2. A computer simulation of laser annealing silicon at 1.06 μm
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1. High power solid green laser annealing system for low temperature poly-Si;The Review of Laser Engineering;2005
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3. Recrystallization of polycrystalline silicon films on ceramics by electron beam;Solar Energy Materials and Solar Cells;1997-11
4. SOI Materials;Silicon-on-Insulator Technology: Materials to VLSI;1997
5. Periodic Phase Structure Formation in Pulse Induced Crystallization of Films;Physica Status Solidi (a);1996-12-16
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