Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control-Reference-Cited by-同舟云学术

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Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control

Published:1994-01 Issue:1 Volume:16 Page:49-55
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Jung Seung-Bae,Kim Seung-Woo

Publisher

Elsevier BV

Subject

General Engineering

Reference21 articles.

1. A piezoceramic fine movement control;Mills;J Phys E Sci Instrum,1981

2. Piezo-driven 50-μm range stage with subnanometer resolution;Scire;Rev Sci Instrum,1978

3. A scanning tunneling microscope with a wide sampling range;Hipps;Rev Sci Instrum,1978

4. Scanning tunneling microscopy;Binnig;IBM J Rev Develop,1986

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