Micromachined Varactors with High Tuning Ratio using Electrostatic and Piezoelectric Actuation Mechanisms
Author:
Affiliation:
1. M..S.Ramaiah Institute of Technology,Department of E&C,Bangalore,Karnataka,India
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10083316/10083513/10083798.pdf?arnumber=10083798
Reference14 articles.
1. High-Q and capacitance ratio multilayer metal-on-piezoelectric RF MEMS varactors;jeffrey s;IEEE Electron Device Letters,2014
2. Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control
3. Micromachined RF MEMS tunable capacitors using piezoelectric actuators;jae y;2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat No 01CH37157),0
4. Stabilization of electrostatically actuated microstructures using parametric excitation
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