Author:
Demichelis F.,Tagliaferro A.
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Modification of magnetron sputtered a-Si1−xCx:H films by implantation of Ge+;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1996-05
2. Modification of magnetron sputtered a-Si1−xCx:H films by implantation of Ge+;Ion Beam Processing of Materials and Deposition Processes of Protective Coatings;1996
3. Ion implantation induced modification of a-SiC : H;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1994-02