INFLUENCE OF CARBON ON AMORPHOUS HYDROGENATED CARBON SILICON TIN ALLOY

Abstract

A systematic experimental investigation on different sets of a-SiSn:H and a-CSiSn:H films prepared in similar conditions has been made. A correlation among the elemental composition (obtained from RBS, nuclear reaction and ERDA analysis), the chemical bonding (from IR absorption measurements), the optical and electrical parameters (from transmittance, reflectance and conductivity measurements) of the two types of alloy leads to a more fundamental understanding about the influence of carbon in amorphous hydrogenated silicon tin and about the possibility of optimizing its physical properties by incorporating convenient carbon contents.