Structural and bonding properties of amorphous silicon nitride films
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference25 articles.
1. Si‐H and N‐H vibrational properties in glow‐discharge amorphous SiNx:H films (0
2. Bonding configuration and defects in amorphous SiNx:H films
3. Microscopic origin of the light-induced defects in hydrogenated nitrogen-rich amorphous silicon nitride films
4. Paramagnetic Point Defects in Amorphous Silicon Dioxide and Amorphous Silicon Nitride Thin Films: II .
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