Bonding configuration and defects in amorphous SiNx:H films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.104533
Reference13 articles.
1. Gap states in silicon nitride
2. Dangling Bonds in Memory‐Quality Silicon Nitride Films
3. Electron Spin Resonance in Discharge-Produced Silicon Nitride
4. Properties of Hydrogenated Amorphous Si-N Prepared by Various Methods
5. Amorphous SiN:H dielectrics with low density of defects
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