Effects of precursor aging and post-deposition treatment time on photo-assisted sol–gel derived low-dielectric constant SiO2 thin film on Si
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Published:2007-02
Issue:2
Volume:38
Page:227-230
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ISSN:0026-2692
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Container-title:Microelectronics Journal
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language:en
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Short-container-title:Microelectronics Journal
Author:
Cheong K.Y.,Jasni F.A.
Subject
General Engineering
Cited by
8 articles.
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