Evaluation of self-organized diffusion barrier continuity on a nano-architectural silica thin film with two-dimensionally connected cage-like pores using positronium time of flight spectroscopy-Reference-Cited by-同舟云学术

Evaluation of self-organized diffusion barrier continuity on a nano-architectural silica thin film with two-dimensionally connected cage-like pores using positronium time of flight spectroscopy

Published:2006-10 Issue:1-3 Volume:95 Page:164-171
ISSN:1387-1811
Container-title:Microporous and Mesoporous Materials
language:en
Short-container-title:Microporous and Mesoporous Materials

Author:

Tanaka H.K.M.,Kurihara T.,Nishiyama N.,Maruo T.,Mills A.P.

Publisher

Elsevier BV

Subject

Mechanics of Materials,Condensed Matter Physics,General Materials Science,General Chemistry

Reference37 articles.

1. The International Technology Roadmap for Semiconductors, International SEMATECH, Austin, TX, 2002.

2. In Search of Low- k Dielectrics

3. Structural Change in Porous Silica Thin Film after Plasma Treatment

4. Low Dielectric Constant Materials for ULSI Interconnects

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Possible experiments with high density positronium;INTERNATIONAL CONFERENCE ON SCIENCE AND APPLIED SCIENCE (ICSAS) 2019;2019

2. Synthesis of highly loaded and well dispersed CuO/SBA-15 via an ultrasonic post-grafting method and its application as a catalyst for the direct hydroxylation of benzene to phenol;Microporous and Mesoporous Materials;2013-09

3. Exploration of a Standing Mesochannel System with Antimatter/Matter Atomic Probes;Advanced Materials;2008-12-16

4. Formation of Ordered Pores Determined by Positronium Time of Flight Spectroscopy;Materials Science Forum;2008-11

5. Evidence of Large Voids in Pure-Silica-Zeolite Low-kDielectrics Synthesized by Spin-on of Nanoparticle Suspensions;Advanced Materials;2008-08-18