Evidence of Large Voids in Pure-Silica-Zeolite Low-kDielectrics Synthesized by Spin-on of Nanoparticle Suspensions-Reference-Cited by-同舟云学术

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Evidence of Large Voids in Pure-Silica-Zeolite Low-kDielectrics Synthesized by Spin-on of Nanoparticle Suspensions

Published:2008-08-18 Issue:16 Volume:20 Page:3110-3116
ISSN:0935-9648
Container-title:Advanced Materials
language:en
Short-container-title:Adv. Mater.

Author:

Eslava Salvador,Baklanov Mikhail R.,Neimark Alexander V.,Iacopi Francesca,Kirschhock Christine E. A.,Maex Karen,Martens Johan A.

Publisher

Wiley

Subject

Mechanical Engineering,Mechanics of Materials,General Materials Science

Reference45 articles.

1. Low dielectric constant materials for microelectronics

2. Porous low dielectric constant materials for microelectronics

3. Materials chemistry for low-k materials

4. Imprinting well-controlled closed-nanopores in spin-on polymeric dielectric thin films

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