Thickness dependent structural, optical and electrical properties of Ti-doped ZnO films prepared by atomic layer deposition
Author:
Funder
Research Council of Norway
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference24 articles.
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2. Transparent conductive oxides for transparent electrode applications;Minami;Semicond. Semimet.,2013
3. Atomic layer deposition: an overview;George;Chem. Rev.,2010
4. Industrial applications of atomic layer deposition;Ritala;ECS Trans.,2009
5. Structural, electrical and optical characterization of Ti-doped ZnO films grown by atomic layer deposition;Bergum;J. Alloy Compd.,2014
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