Author:
Wicher Bartosz,Chodun Rafał,Nowakowska-Langier Katarzyna,Okrasa Sebastian,Trzciński Marek,Król Krystian,Minikayev Roman,Skowroński Łukasz,Kurpaska Łukasz,Zdunek Krzysztof
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference44 articles.
1. Diffusion Phenomena in Thin Films and Microelectronic Materials;Gupta,1988
2. Viet H. Nguyen, H. Kranenburg, P.H. Woerlee, Copper for advanced interconnect, in: Proceedings of the Third International Workshop on Materials Science, Hanoi, 1999.
3. Correlation between mechanical and microstructural properties of molybdenum nitride thin films deposited on silicon by reactive R.F. magnetron discharge;Bouaouina;Surf. Coat. Technol.,2018
4. Impact of sputter deposition parameters on molybdenum nitride thin film properties;Stober;J. Micromech. Microeng.,2015
5. Surface characteristics of MoNx thin films obtained by reactive rf magnetron sputtering in UHV system;Jeong;Bull. Korean Chem. Soc.,2015
Cited by
22 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献