Surface Characteristics of MoNxThin Films Obtained by Reactive rf Magnetron Sputtering in UHV System
Author:
Affiliation:
1. Department of Chemistry; Pukyong National University; Busan 608-737 Korea
2. Nano/Bio Interface Center; University of Pennsylvania; Philadelphia PA 19104 USA
Funder
National Research Foundation of Korea
Ministry of Education
Publisher
Wiley
Subject
General Chemistry
Reference26 articles.
1. Atomic Layer Deposited Molybdenum Nitride Thin Film: A Promising Anode Material for Li Ion Batteries
2. Mo2N nanobelts for dehydrogenation of aromatic alcohols
3. Electro-reduction of nitrogen on molybdenum nitride: structure, energetics, and vibrational spectra from DFT
4. Analysis of molybdenum(3d) XPS spectra of supported molybdenum catalysts: an alternative approach
5. Ultrathin Mo/MoN bilayer nanostructure for diffusion barrier application of advanced Cu metallization
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