Atomic Layer Deposited Molybdenum Nitride Thin Film: A Promising Anode Material for Li Ion Batteries
Author:
Affiliation:
1. Department of Energy Science and Engineering, IIT Bombay, Mumbai, Maharashtra 400076, India
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/am500285d
Reference62 articles.
1. Epitaxial Superconducting δ-MoN Films Grown by a Chemical Solution Method
2. Synthesis and Characterization of Superconducting β-Mo2N Crystalline Phase on a Si Substrate: An Application of Pulsed Laser Deposition to Nitride Chemistry
3. Solid state synthesis of a new ternary nitride MgMoN2 nanosheets and micromeshes
4. Sputter-deposited Mo and reactively sputter-deposited Mo-N films as barrier layers against Cu diffusion
5. Atomic Layer Deposition of Molybdenum Nitride Thin Films for Cu Metallizations
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