Impact of sputter deposition parameters on molybdenum nitride thin film properties-Reference-Cited by-同舟云学术

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Impact of sputter deposition parameters on molybdenum nitride thin film properties

Published:2015-05-22 Issue:7 Volume:25 Page:074001
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Stöber L,Konrath J P,Krivec S,Patocka F,Schwarz S,Bittner A,Schneider M,Schmid U

Funder

Austrian Research Promotion Agency (FFG)

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/25/i=7/a=074001/pdf

Reference24 articles.

1. Superconductivity in Molybdenum

2. High-pressure synthesis and crystal structure of γ-Mo2N

3. Tribological properties of MoNx coatings in contact with copper

4. Study of sputtered molybdenum nitride as a diffusion barrier

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1. Deposition of a low-stress diamond film on stainless steel with a Mo/Mo-N interlayer;Surface and Coatings Technology;2024-10

2. Synthesis and characterization of volatile liquid Mo precursors for vapor phase deposition of thin films containing molybdenum;Polyhedron;2023-08

3. Molybdenum Thin Film Formation from Molybdenum Nitride Deposited by Plasma-enhanced Atomic Layer Deposition with Hydrogen-permeable Mechanical Capping Layer;ACS Applied Electronic Materials;2023-07-27

4. Magnetron Sputtered Thin Films Based on Transition Metal Nitride: Structure and Properties;physica status solidi (a);2022-12-16

5. Properties of Wear-Resistant MoN Films on Microengineered Substrates;Coatings;2022-08-24

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