Depth resolution and preferential sputtering in depth profiling of delta layers
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference23 articles.
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4. Dependence of depth resolution on primary energy of low-energy Ar+ Ions (100–1000 eV) in AES sputter depth profiling of GaAs/AlAs superlattice;Bungo;Surf. Interface Anal.,2006
5. Determination and application of the depth resolution function in sputter profiling with secondary ion mass spectroscopy and Auger electron spectroscopy;Hofmann;J. Vac. Sci. Technol. A,1998
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