Engineering the size and density of silicon agglomerates by controlling the initial surface carbonated contamination-Reference-Cited by-同舟云学术

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Engineering the size and density of silicon agglomerates by controlling the initial surface carbonated contamination

Published:2013-04 Issue: Volume:270 Page:295-300
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Borowik Ł.,Chevalier N.,Mariolle D.,Martinez E.,Bertin F.,Chabli A.,Barbé J.–C.

Funder

French “Recherche Technologique de Base” Program

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference20 articles.

1. Formation of silicon islands on a silicon on insulator substrate upon thermal annealing;Legrand;Applied Physics Letters,2000

2. Pattern-induced alignment of silicon islands on buried oxide layer of silicon-on-insulator structure;Ishikawa;Applied Physics Letters,2003

3. Thermal agglomeration of single-crystalline Si layer on buried SiO2 in ultrahigh vacuum;Nuryadi;Journal of Vacuum Science and Technology B,2002

4. Orientation-dependent dewetting of patterned thin Si film on SiO2;Dornel;Materials Research Society Symposia Proceedings,2006

5. Surface-energy-driven dewetting theory of silicon-on-insulator agglomeration;Danielson;Journal of Applied Physics,2006

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of argon implantation on solid-state dewetting: control of size and surface density of silicon nanocrystals;Nanotechnology;2016-12-20

2. How to control solid state dewetting: A short review;Surface Science Reports;2016-06

3. From Solid-State Dewetting of Ultrathin, Compressively Strained Silicon–Germanium-on-Insulator Films to Mastering the Stoichiometry of Si1–xGex Nanocrystals;The Journal of Physical Chemistry C;2016-03-25

4. Scanning Auger microscopy for high lateral and depth elemental sensitivity;Journal of Electron Spectroscopy and Related Phenomena;2013-12

5. The influence of strain on dewetting of silicon films;Journal of Applied Physics;2013-08-14

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