The influence of strain on dewetting of silicon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4817652
Reference16 articles.
1. Agglomeration control during the selective epitaxial growth of Si raised sources and drains on ultra-thin silicon-on-insulator substrates
2. xThermally assisted formation of silicon islands on a silicon-on-insulator substrate
3. Thermal agglomeration of single-crystalline Si layer on buried SiO[sub 2] in ultrahigh vacuum
4. Thermal Agglomeration of Thin Single Crystal Si on $\bf SiO_{2}$ in Vacuum
5. Orientation-Dependent Dewetting of Patterned Thin Si Film on SiO2
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1. Stress-Induced Acceleration and Ordering in Solid-State Dewetting;Physical Review Letters;2022-01-12
2. Effect of deposition conditions on the thermal stability of Ge layers on SiO2 and their dewetting behavior;Thin Solid Films;2020-01
3. Effect of argon implantation on solid-state dewetting: control of size and surface density of silicon nanocrystals;Nanotechnology;2016-12-20
4. Templated Solid-State Dewetting of Thin Silicon Films;Small;2016-09-22
5. How to control solid state dewetting: A short review;Surface Science Reports;2016-06
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