Surface-energy-driven dewetting theory of silicon-on-insulator agglomeration
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2357345
Reference27 articles.
1. Agglomeration control during the selective epitaxial growth of Si raised sources and drains on ultra-thin silicon-on-insulator substrates
2. Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology;Ikeda H.
3. Thermal agglomeration of single-crystalline Si layer on buried SiO[sub 2] in ultrahigh vacuum
4. Effect of patterning on thermal agglomeration of ultrathin silicon-on-insulator layer
5. Pattern-induced alignment of silicon islands on buried oxide layer of silicon-on-insulator structure
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