Chemical and structural properties of polymorphous silicon thin films grown from dichlorosilane-Reference-Cited by-同舟云学术

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Chemical and structural properties of polymorphous silicon thin films grown from dichlorosilane

Published:2013-11 Issue: Volume:285 Page:431-439
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Álvarez-Macías C.,Monroy B.M.,Huerta L.,Canseco-Martínez M.A.,Picquart M.,Santoyo-Salazar J.,Sánchez M.F. García,Santana G.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference35 articles.

1. Structural, optical and electronic properties of hydrogenated polymorphous silicon films deposited at 150°C

2. Chemistry of the chlorine-terminated surface for low-temperature growth of crystal silicon films by RF plasma-enhanced chemical vapor deposition

3. Structural and electronic properties of hydrogenated polymorphous silicon films deposited at high rate

4. Effects of high hydrogen dilution ratio on optical properties of hydrogenated nanocrystalline silicon thin films

5. Growth and optoelectronic properties of polymorphous silicon thin films

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1. Very low-temperature growth of silicon thin films using chlorinated precursors and optical properties;Materials Science in Semiconductor Processing;2020-03

2. Local Surface Electric Field’s Effect on Adsorbed Proteins’ Orientation;Surfaces;2019-05-20

3. Influence of oxygen concentration on the optoelectronic properties of hydrogenated polymorphous silicon thin films;Thin Solid Films;2017-09

4. Characterization of PECVD a-C:H:Si:O:Cl films;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-07

5. The Role of Structural and Chemical Properties in Pm-Si:h Thin Films to Determine the Optoelectronic Characteristics and Stability by Soaking Light for Applications in Solar Cell;Proceedings of the ISES Solar World Congress 2015;2016

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