Numerical study on surface acoustic wave method for determining Young's modulus of low-k films involved in multi-layered structures
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
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4. Study on the interfacial adhesion property of low-k thin film by the surface acoustic waves with cohesive zone model;Applied Surface Science;2016-12
5. Laser-induced surface acoustic waves: An alternative method to nanoindentation for the mechanical characterization of porous nanostructured thin film electrode media;Mechanics of Materials;2015-12
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