Mechanical properties of periodic porous silica low-k films determined by the twin-transducer surface acoustic wave technique
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1611615
Reference6 articles.
1. Critical properties of nanoporous low dielectric constant films revealed by Brillouin light scattering and surface acoustic wave spectroscopy
2. A photoacoustic method for characterising thin films
3. Non-destructive characterization of plasma-sprayed ZrO2 coatings by ultrasonic surface waves
4. Surface acoustic wave depth profiling of elastically inhomogeneous materials
5. Mechanical and elastic properties of amorphous hydrogenated silicon films studied by broadband surface acoustic wave spectroscopy
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