Sulfur passivation for the formation of Si-terminated Al2O3/SiGe(0 0 1) interfaces

Author:

Sardashti Kasra,Hu Kai-Ting,Tang Kechao,Park Sangwook,Kim Hyonwoong,Madisetti Shailesh,McIntyre Paul,Oktyabrsky Serge,Siddiqui Shariq,Sahu Bhagawan,Yoshida Noami,Kachian Jessica,Kummel Andrew

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Low Surface Recombination in Hexagonal SiGe Alloy Nanowires: Implications for SiGe-Based Nanolasers;ACS Applied Nano Materials;2024-01-12

2. Dielectric Confined Nickel-Titanium Germano-Silicide Junctions to SiGe Nanochannels;2023 IEEE Nanotechnology Materials and Devices Conference (NMDC);2023-10-22

3. A Novel FinFET Device with a Four-Period Vertically Stacked SiGe/Si Fin;2022 7th International Conference on Integrated Circuits and Microsystems (ICICM);2022-10-28

4. Advanced process and electron device technology;Tsinghua Science and Technology;2022-06

5. Electrical Characteristics of Si0.8Ge0.2 p-MOSFET With TMA Pre-Doping and NH3 Plasma IL Treatment;IEEE Transactions on Electron Devices;2022-04

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