Funder
European Community
Aalto University School of Chemical Technology
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference42 articles.
1. Applications and requirements for MEMS scanner mirrors;Wolter,2005
2. Optical thin films with high reflectance, low thickness and low stress for the spectral range from vacuum UV to near IR;Minghong;J. Opt. A: Pure Appl. Opt.,2006
3. On the thermal expansion coefficients of thin films;Fang;Sens. Actuators A: Phys.,2000
4. Introduction to Microfabrication;Franssila,2004
5. Micromechanical characterization of ALD thin films;Berdova,2015
Cited by
11 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献