Effect of propane/silane ratio on the growth of 3C-SiC thin films on Si(100) substrates by APCVD-Reference-Cited by-同舟云学术

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Effect of propane/silane ratio on the growth of 3C-SiC thin films on Si(100) substrates by APCVD

Published:2012-10 Issue: Volume:259 Page:685-690
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Shi Biao,Liu Xue-Chao,Zhu Ming-Xing,Yang Jian-Hua,Shi Er-Wei

Funder

Young Scientists Fund of the National Natural Science Foundation of China

Innovation Program of the Chinese Academy of Sciences

Industry-Academic Joint Technological Innovations Fund Project of Jiangsu Province

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference23 articles.

1. Ultrahigh-quality silicon carbide single crystals;Nakamura;Nature,2004

2. Growth and characterization of 3C-SiC films for micro electro mechanical systems (MEMS) applications;Bosi;Crystal Growth and Design,2009

3. Stress reduction in epitaxial GaN films on Si using cubic SiC as intermediate layers;Komiyama;Journal of Applied Physics,2006

4. Effects of carbonization and substrate temperature on the growth of 3C-SiC on Si(111) by SSMBE;Liu;Applied Surface Science,2008

5. Structural defects in (100) 3C-SiC heteroepitaxy: Influence of the buffer layer morphology on generation and propagation of stacking faults and microtwins;Severino;Diamond and Related Materials,2009

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1. High-throughput thermodynamic analysis of the CVD of SiC from the SiCl4-CH4-H2 system;Surface and Coatings Technology;2023-09

2. Graphite-Si-SiC ceramics produced by microwave assisted reactive melt infiltration;Journal of the European Ceramic Society;2019-07

3. Effect of hydrogen flow on microtwins in 3C–SiC epitaxial films by laser chemical vapor deposition;Thin Solid Films;2019-05

4. Heteroepitaxial 3C-SiC on Si (1 0 0) with flow-modulated carbonization process conditions;Journal of Crystal Growth;2019-01

5. Structural and optical characteristics of in-situ sputtered highly oriented 15R-SiC thin films on different substrates;Journal of Applied Physics;2018-01-14

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