Author:
Lee Woo-Jin,Park Hyung-Soon
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference6 articles.
1. Structure and Electrical Properties of Thin Ta2O5Deposited on Metal Electrodes
2. Ultrathin Ta2 O 5 Film Capacitor with Ru Bottom Electrode
3. Ta2O5 thin films with exceptionally high dielectric constant
4. K. Moeggenborg, V. Brusic, I. Cherian, A. Navarro-Powell, W. Downing, in: Proceedings of Sixth International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, Santa Clara, CA, 2001, p. 150.
5. M. Pourbaix, Atlas of Electrochemical Equilibria in Aqueous Solution, Pergamon Press, UK, 1966.
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