Investigation of humidity-dependent nanotribology behaviors of Si(100)/SiO2 pair moving from stick to slip

Author:

Yu Jiaxin,Chen Lei,Qian Linmao,Song Danlu,Cai Yong

Funder

Natural Science Foundation of China

Scientific Research Fund of Sichuan Provincial Education Department, China

Open Foundation of Key Laboratory of Testing Technology for Manufacturing Process, Ministry of Education, China

Research Foundation of Southwest University of Science and Technology

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference37 articles.

1. Trends and frontiers of MEMS;Ko;Sensors and Actuators A,2007

2. Recent developments in electroceramics: MEMS applications for energy and environment;Goel;Ceramics International,2004

3. Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices;Bhushan;Microelectronic Engineering,2007

4. Nanotribology and MEMS;Kim;Nano Today,2007

5. Tribology and MEMS;Williams;Journal of Physics D,2006

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