Soft abrasive facilitating materials removal of SiO2/Si bilayer materials: A molecular dynamics study
Author:
Funder
Shanxi Province Science Foundation for Youths
Publisher
Elsevier BV
Subject
Condensed Matter Physics,General Materials Science
Reference57 articles.
1. The crystallographic change in sub-surface layer of the silicon single crystal polished by chemical mechanical polishing;Xu;Tribol. Int.,2007
2. Chemomechanical polishing of silicon - surface termination and mechanism of removal;Pietsch;Appl. Phys. Lett.,1994
3. The atomic scale removal mechanism during chemomechanical polishing of Silicon: an atomic force microscopy study;Katsuki,2005
4. Experimental investigation on mechanisms of silicon chemical mechanical polishing;Estragnat;J. Electron. Mater.,2004
5. Towards a deeper understanding of plastic deformation in mono-crystalline silicon;Zhang;Int. J. Mech. Sci.,2001
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Effects of chemical action of polishing medium on the material removal of SiC;Precision Engineering;2024-08
2. Trivalent lanthanum and ytterbium doped meso-silica/ceria abrasive systems toward chemical mechanical polishing (CMP) and ultraviolet irradiation-assisted photochemical mechanical polishing (PCMP);Applied Surface Science;2024-06
3. Lapping of sapphire using developed clusters of diamond and ceria chemically active abrasives;Materials Today Communications;2024-06
4. An efficient catalytic composite abrasive cluster with excellent catalytic and micro-cutting capabilities in the friction chemical polishing processes;Journal of Manufacturing Processes;2024-04
5. A novel atomic removal model for chemical mechanical polishing using developed mesoporous shell/core abrasives based on molecular dynamics;Nanoscale;2024
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3