Nanotribology and MEMS
Author:
Publisher
Elsevier BV
Subject
Pharmaceutical Science,General Materials Science,Biomedical Engineering,Bioengineering,Biotechnology
Reference93 articles.
1. Integrated movable micromechanical structures for sensors and actuators
2. IC-processed electrostatic micromotors
3. Design considerations for a practical electrostatic micro-motor
4. An integrated force-balanced capacitive accelerometer for low-g applications
5. Micromachining technology for thermal ink-jet products
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