Subject
Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference115 articles.
1. Microelectromechanical Systems: Advanced Materials and Fabrication Methods;Anonymous,1997
2. Small Tech 101 – An Introduction to Micro and Nanotechnology;Anonymous,2003
3. Designing for MEMS Reliability
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