Abstract
Microelectromechanical systems (MEMS) devices are being manufactured in the hundreds of millions and are widely deployed for pressure sensor, accelerometer, display, and printing applications. This suggests customer confidence in the longterm reliability of MEMS (also known as microsystems or micromachines) under diverse stringent conditions.
Publisher
Springer Science and Business Media LLC
Subject
Physical and Theoretical Chemistry,Condensed Matter Physics,General Materials Science
Cited by
43 articles.
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