Versatile tool for characterising long-term stability and reliability of micromechanical structures-Reference-Cited by-同舟云学术

Versatile tool for characterising long-term stability and reliability of micromechanical structures

Published:2000-08 Issue:1-3 Volume:85 Page:84-89
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Kazinczi R,Mollinger J.R,Bossche A

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. Optimalization of a low-stress silicon nitride process for surface-micromachining applications;French;Sens. Actuators, A,1997

2. Friction in surface micromachined microengines;Miller;Proc. SPIE Smart Electronics and MEMS,1996

3. Micromechanical fatigue testing;Connally;Exp. Mech.,1993

4. Ageing phenomena in heavily doped (p+) micromachined silicon cantilever beams;Tabib-Azar;Sens. Actuators, A,1992

5. Vibration monitoring and diagnosis;Collacott,1979

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Determination of failure mechanisms for AlN-based microcantilevers with use of Twyman-Green interferometry;SPIE Proceedings;2012-09-13

2. Interferometry of AlN-based microcantilevers to determine the material properties and failure mechanisms;SPIE Proceedings;2012-04-26

3. Interferometric study of reliability of microcantilevers driven by AlN sandwiched between two metal layers;Sensors and Actuators A: Physical;2011-11

4. Reliability study of AlN-driven microcantilevers based on interferometric measurements of their static and dynamic behaviours;Interferometry XV: Applications;2010-08-01

5. Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin films;Journal of Applied Physics;2005-08-15