Aging phenomena in heavily doped (p+) micromachined silicon cantilever beams-Reference-Cited by-同舟云学术

Aging phenomena in heavily doped (p+) micromachined silicon cantilever beams

Published:1992-06 Issue:3 Volume:33 Page:199-206
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Tabib-Azar M.,Wong K.,Ko Wen

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Silicon as a mechanical material;Petersen;Proc. IEEE,1982

2. Microdynamics;Muller;Sensors and Actuators,1989

3. Microsensors vs integrated circuits: a study in contrasts;Senturia;Proc. Int. Electron Devices Meet., Washington, DC, USA, Dec. 3–6, 1989,1989

4. Micro-robotics in medical diagnosis and surgery;Fujimasa;1990 Int. Symp., Simon Fraser University, Vancouver, BC, Canada,1990

5. Residual stress and mechanical properties of boron-doped p+-silicon films;Ding;Sensors and Actuators,1990

Cited by 37 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fatigue Analysis and Estimation of the Number of Exposure Cycles until the Failure of the Sensitive Element of a Micromechanical Capacitive Accelerometer;Russian Microelectronics;2023-12

2. Fatigue of Micro-Electro-Mechanical Systems (Mems) Thin Films;Comprehensive Structural Integrity;2023

3. A Novel Methodology to Obtain the Mechanical Properties of Membranes by Means of Dynamic Tests;Membranes;2022-03-02

4. A Systematic Review of Reliability Issues in RF-MEMS Switches;Micro and Nanosystems;2019-04-02

5. Light-Driven and Optically Actuated Technologies;Optical Nano and Micro Actuator Technology;2012-11-27