Affiliation:
1. Department of Mechatronics Engineering, National University of Sciences and Technology, Islamabad, Pakistan
Abstract
The main challenge in the commercialization of the RF-MEMS switches is their reliability,
related to both the electrical and mechanical domains. The development of test standards and understanding
the underlying physics of different failure modes has always been of major concern for the
RF-MEMS designers. This paper reviews the different failure modes in the RF-MEMS switches like
stiction, residual stress, cyclic fatigue, creep, wear and packaging in detail. The origin of these failure
modes, their characterization procedure and respective solutions presented in the literature are presented
to get a better understanding of the state of the art work done in the field RF-MEMS reliability
for nearly past two decades.
Publisher
Bentham Science Publishers Ltd.
Subject
Building and Construction
Cited by
21 articles.
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