Mechanisms of tool-workpiece interaction in ultraprecision diamond turning of single-crystal SiC for curved microstructures
Author:
Funder
Japan Society for the Promotion of Science
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference42 articles.
1. Silicon-carbide microfabrication by silicon lost molding for glass-press molds;Itoh;J. Microelectromech. Syst.,2006
2. Shape adaptive grinding of CVD silicon carbide;Beaucamp;CIRP Annals,2014
3. Highly efficient planarization of sliced 4H–SiC (0001) wafer by slurryless electrochemical mechanical polishing;Yang;Int. J. Mach. Tool Manufact.,2019
4. Plasma assisted polishing of single crystal SiC for obtaining atomically flat strain-free surface;Yamamura;CIRP Annals,2011
5. Fabrication of infrared hexagonal microlens array by novel diamond turning method and precision glass molding;Zhang;J. Micromech. Microeng.,2019
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