Adaptive parametric yield enhancement via collinear multivariate analytics for semiconductor intelligent manufacturing
Author:
Funder
Taiwan Ministry of Science and Technology
Publisher
Elsevier BV
Subject
Software
Reference39 articles.
1. A framework for root cause detection of sub-batch processing system for semiconductor manufacturing big data analytics;Chien;IEEE Trans. Semicond. Manuf.,2014
2. Strategic capacity planning for smart production: Decision modeling under demand uncertainty;Chien;Appl. Soft Comput.,2018
3. Tool allocation to smooth work-in-process for cycle time reduction and an empirical study;Chien;Ann. Oper. Res.,2020
4. Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement;Chien;Int. J. Prod. Res.,2017
5. Data mining for yield enhancement in semiconductor manufacturing and an empirical study;Chien;Expert Syst. Appl.,2007
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Virtual metrology of material removal rate using a one-dimensional convolutional neural network-based bidirectional long short-term memory network with attention;Computers & Industrial Engineering;2023-12
2. Bayesian-based uncertainty-aware tool-wear prediction model in end-milling process of titanium alloy;Applied Soft Computing;2023-11
3. Advanced quality control for probe precision forming to empower virtual vertical integration for semiconductor manufacturing;Computers & Industrial Engineering;2023-09
4. A deep residual neural network for semiconductor defect classification in imbalanced scanning electron microscope datasets;Applied Soft Computing;2022-12
5. Decision-based virtual metrology for advanced process control to empower smart production and an empirical study for semiconductor manufacturing;Computers & Industrial Engineering;2022-07
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3