Analysing semiconductor manufacturing big data for root cause detection of excursion for yield enhancement
Author:
Affiliation:
1. Department of Industrial Engineering & Engineering Management, National Tsing Hua University, Hsinchu, Taiwan
Funder
National Science Council Taiwan
Publisher
Informa UK Limited
Subject
Industrial and Manufacturing Engineering,Management Science and Operations Research,Strategy and Management
Link
https://www.tandfonline.com/doi/pdf/10.1080/00207543.2015.1109153
Reference43 articles.
1. A maximum entropy approach to feature selection in knowledge-based authentication
2. Recipe-Independent Indicator for Tool Health Diagnosis and Predictive Maintenance
3. A Framework for Root Cause Detection of Sub-Batch Processing System for Semiconductor Manufacturing Big Data Analytics
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