Injected ion energy dependence of SiC film deposited by low-energy SiC3H9+ ion beam produced from hexamethyldisilane
Author:
Funder
JSPS
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference37 articles.
1. Formation of iron film by ion beam deposition;Miyake;Surf. Coat. Technol.,1994
2. Growth of carbon thin film by low-energy mass-selected ion beam deposition;Ohno;Nucl. Instrum. Meth. Phys. Res. B,1999
3. Advances in SiC power MOSFET technology;Dimitrijev;Microelectron. Reliab.,2003
4. Step-controlled epitaxial growth of SiC: high quality homoepitaxy;Matsunami;Mater. Sci. Eng. R,1997
5. Single-crystalline, epitaxial cubic SiC films grown on (100) Si at 750°C by chemical vapor deposition;Golecki;Appl. Phys. Lett.,1992
Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Ion chemistry and ionic thin film deposition from HMDS‐photochemistry induced by VUV‐radiation from an atmospheric plasma;Plasma Processes and Polymers;2024-01-22
2. Low energy Si+, SiCH5+, or C+ beam injections to silicon substrates during chemical vapor deposition with dimethylsilane;Heliyon;2023-08
3. Low-energy Ar+ ion beam induced chemical vapor deposition of silicon carbide films using dimethylsilane;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2022-09
4. Low-energy O+ ion beam induced chemical vapor deposition using tetraethyl orthosilicate for silicon dioxide film formation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2022-01
5. Low-energy O+ ion beam induced chemical vapor deposition using hexamethyldisilane or hexamethyldisilazane for silicon dioxide film formation;AIP Advances;2021-12-01
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3