Growth of carbon thin film by low-energy mass-selected ion beam deposition
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference9 articles.
1. Properties of filtered-ion-beam-deposited diamondlike carbon as a function of ion energy
2. Ion‐Beam Deposition of Thin Films of Diamondlike Carbon
3. The epitaxial synthesis of diamond by the deposition of low energy carbon ions
4. Preparation and structure of carbon film deposited by a mass‐separated C+ion beam
5. Chemically bonded diamondlike carbon films from ion-beam deposition
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