An accurate semi-empirical equation for sputtering yields, II: for neon, argon and xenon ions-Reference-Cited by-同舟云学术

An accurate semi-empirical equation for sputtering yields, II: for neon, argon and xenon ions

Published:2005-04 Issue:3-4 Volume:229 Page:348-358
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Seah M.P.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference35 articles.

1. Practical Surface Analysis;Hofmann,1990

2. Practical Surface Analysis;Wittmaack,1992

4. Practice Surface Analysis;Briggs,1992

5. M.P. Seah, C.A. Clifford, F.M. Green, I.S. Gilmore, Surf. Interface Anal., in press

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