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Sputter yields of monoatomic solids by Ar and Ne ions near the threshold: A Bayesian analysis of the Yamamura Model

  • Published:2022-06 Issue: Volume:520 Page:29-39
  • ISSN:0168-583X
  • Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  • language:en
  • Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Phadke ParikshitORCID,Zameshin Andrey A.,Sturm Jacobus M.,van de Kruijs Robbert W.E.,Bijkerk Fred

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Sputtering yields of TiC and MAX phase Ti2AlC using Ne, Ar, Xe ions;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2024-09

2. Review: Machine learning for advancing low-temperature plasma modeling and simulation;Journal of Micro/Nanopatterning, Materials, and Metrology;2023-12-28
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