Subject
Instrumentation,Nuclear and High Energy Physics
Cited by
6 articles.
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1. Characterization of radiation damage induced by B and B4 ion implantation into silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2011-12
2. Cluster–surface interaction: From soft landing to implantation;Surface Science Reports;2011-10
3. Energetic cluster ion beams: Modification of surfaces and shallow layers;Materials Science and Engineering: R: Reports;2011-08
4. Emergence of non-linear effects in nanocluster collision cascades in amorphous silicon;New Journal of Physics;2008-02-12
5. High-fluence small Bn cluster ion implantation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-08