Ion sputtering at grazing incidence for SIMS-analysis
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference5 articles.
1. Spherical angular distribution of atoms sputtered with energetic deuterium at grazing incidence
2. Angular distributions and differential sputtering yields of binary compounds as a function of angle of incidence
3. Sputtering studies with the Monte Carlo Program TRIM.SP
4. Distortion of SIMS profiles due to ion beam mixing
5. Distortion of sims profiles due to ion beam mixing: Shallow arsenic implants in silicon
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