Sputtering studies with the Monte Carlo Program TRIM.SP-Reference-Cited by-同舟云学术

Sputtering studies with the Monte Carlo Program TRIM.SP

Published:1984-06 Issue:2 Volume:34 Page:73-94
ISSN:0721-7250
Container-title:Applied Physics A Solids and Surfaces
language:en
Short-container-title:Appl. Phys. A

Author:

Biersack J. P.,Eckstein W.

Publisher

Springer Science and Business Media LLC

Subject

General Materials Science,General Chemistry,Physics and Astronomy (miscellaneous),General Engineering,General Materials Science

Link

http://link.springer.com/content/pdf/10.1007/BF00614759.pdf

Reference67 articles.

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3. 47,1981

4. D.P. Jackson: In Proc. of the Symp. Sputtering, ed. by Varga, Betz, Viehb�ck, Inst. f. Allgem. Physik, TU Wien (1980)

5. D.E. Harrison: Radiat. Elf.70, 1 (1983)

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