Swelling and optical properties of Si3N4 films irradiated in the electronic regime
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference15 articles.
1. Rapid thermal nitridation of SiO2 for nitroxide thin dielectrics
2. Charge Transport and Storage in Metal‐Nitride‐Oxide‐Silicon (MNOS) Structures
3. Stress in ion‐implanted CVD Si3N4films
4. Overview on SiN surface passivation of crystalline silicon solar cells
5. Morphology of LPCVD Si3N4 films after high temperature treatment and HF etching
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2. Nanoindentation testing of Si3N4 irradiated with swift heavy ions;Journal of Nuclear Materials;2021-11
3. Correlation between changes in nanoscale structural and optical properties upon swift heavy ion irradiation of SiNx thin films;Journal of Applied Physics;2021-01-21
4. Radiation resistance of nanolayered silicon nitride capacitors;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2020-05
5. Stabilization of Si rich nitride phase by swift heavy ion irradiation in non-stoichiometric a-SiNx:H thin films;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-11
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