High-aspect ratio microstructures in p-type GaAs and InP created by proton beam writing
Author:
Funder
Deutsche Forschungsgemeinschaft (DFG)
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference15 articles.
1. Maskless proton beam writing in gallium arsenide
2. Fabrication of microstructures in III–V semiconductors by proton beam writing
3. Creation of GaAs microstructures using the nuclear nanoprobe LIPSION
4. Three-dimensional microfabrication in bulk silicon using high-energy protons
5. New developments in the applications of proton beam writing
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4. Detecting the micro-defects in the GaAs materials by time resolved emissions;Chinese Science Bulletin;2014-03-30
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