New developments in the applications of proton beam writing-Reference-Cited by-同舟云学术

New developments in the applications of proton beam writing

Published:2005-08 Issue:1-2 Volume:237 Page:188-192
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Mistry P.,Gomez-Morilla I.,Grime G.W.,Webb R.P.,Gwilliam R.,Cansell A.,Merchant M.,Kirkby K.J.,Teo E.J.,Breese M.B.H.,Bettiol A.A.,Blackwood D.J.,Watt F.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference16 articles.

1. H.F. Ted Fedynyshyn, J. Willem Gemmink, I. Hanyu, N. Hayashi, S. Hector, International Technology Roadmap for Semiconductors – Lithography. Semiconductor Industry Association, 2003.

2. The new Surrey ion beam analysis facility;Simon;Nucl. Instr. and Meth. B,2004

3. Three-dimensional micromachining of silicon using a nuclear microprobe;Teo;Nucl. Instr. and Meth. B,2004

4. The National University of Singapore high energy ion nano-probe facility: performance test;Watt;Nucl. Instr. and Meth. B,2003

5. Three-dimensional nanolithography using proton beam writing;van Kan;Appl. Phys. Lett.,2003

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1. Performance test of high brightness nano-aperture ion source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-08

2. Fabrication and analysis of polymer microstructures through ion microprobe techniques;Journal of Applied Polymer Science;2015-12-12

3. Fabrication of fine imaging devices using an external proton microbeam;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-08

4. Micromachining of commodity plastics by proton beam writing and fabrication of spatial resolution test-chart for neutron radiography;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-07

5. Proton beam writing on PMMA and SU-8 films as a tool for development of micro-structures for organic electronics;Applied Surface Science;2012-02