Author:
Menzel F,Spemann D,Lenzner J,Böhlmann W,Zimmermann G,Butz T
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
8 articles.
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1. Impact of MeV-Ag ions irradiation of silicon substrate on structural and optical properties of porous silicon;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2024-03
2. MeV-Fe ions implantation of GaAs – Induced morphological and structural modification of porous GaAs;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2021-04
3. Greyscale proton beam writing in p-type Gallium Arsenide;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2013-07
4. 3D microstructuring in p-GaAs with proton beam writing using multiple ion fluences;Journal of Micromechanics and Microengineering;2012-01-13
5. Materials analysis and modification at LIPSION – Present state and future developments;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2011-10