Author:
Lei Hong,Jiang Lei,Chen Ruling
Subject
General Chemical Engineering
Reference21 articles.
1. Chemical mechanical polishing of interlayer dielectric: a review;Ali;Solid State Technology,1994
2. XPS study of CMP mechanisms of NiP coating for hard disk drive substrates;Qi;Tribology International,2010
3. Sub-nanometer precision polishing of glass substrate with a colloidal SiO2 slurry;Lei;Lubrication Engineering,2006
4. Ceria concentration effect on chemical mechanical polishing of optical glass;Wang;Applied Surface Science,2007
Cited by
27 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献